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Aligner
모델명 MA-8
제작 업체명, 국가 SUSS Microtec, 독일
기능 고해상도 사진공정용, Top Side Align & Back Side Align 가능 Ramp: I line - 365nm
담당자 신소원, tel: 02-944-6026
email: sowon87@seoultp.or.kr
⦁ Wafer Size : 4inch ~ 8inch, Ceramic
⦁ Mask Size : 5inch X 5inch, 7inch X 7inch, 9inch X 9inch
⦁ Resolution : down to 0.5μm
⦁ Excimer Laser Optics : e.g. KrF (248 nm) or ArF (193nm)
⦁ Exposure Source : Hg lamps 365nm


Specification
Wafer size 4”, 6” 8”
Mask size 5”×5”, 7”×7”, 9”×9”
Align gap 1~300㎛
Movement range X ±10mm/ Y: ±5mm/ : ±5°
Back side align
Lamp power Hg 1000W
Wafer bonding & align

application
Photo lithography for > 1㎛ scale pattern