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Akali Wet Bench
모델명 Akali
제작 업체명, 국가 ATIS(아티스), 대한민국
기능 Wafer cleaning 및 etching 공정작업.
담당자 신소원, tel: 02-944-6026
email: sowon87@seoultp.or.kr
⦁ Pre-cleaning
Diffusion cleaning / Pre-oxidation cleaning
Pre-CVD, Metal, Silicide cleaning
⦁ Post-cleaning
PR strip, Solvent strip, Post-CMP cleaning
Post-CVD, Metal cleaning
⦁ Etching
Nitride strip, oxide etching, contact hole etching


Specification
다목적 wet bench
application

Wafer cleaning
KOH etching, oxide etching