Home Login Contact us
Akali Wet Bench
¸ðµ¨¸í Akali
Á¦ÀÛ ¾÷ü¸í, ±¹°¡ ATIS(¾ÆÆ¼½º), ´ëÇѹα¹
±â´É Wafer cleaning ¹× etching °øÁ¤ÀÛ¾÷.
´ã´çÀÚ ½Å¼Ò¿ø, tel: 02-944-6026
email: sowon87@seoultp.or.kr
⦁ Pre-cleaning
Diffusion cleaning / Pre-oxidation cleaning
Pre-CVD, Metal, Silicide cleaning
⦁ Post-cleaning
PR strip, Solvent strip, Post-CMP cleaning
Post-CVD, Metal cleaning
⦁ Etching
Nitride strip, oxide etching, contact hole etching


Specification
´Ù¸ñÀû wet bench
application

Wafer cleaning
KOH etching, oxide etching