 |
|
|||||||||||||||
|
⦁ Pre-cleaning
Diffusion cleaning / Pre-oxidation cleaning Pre-CVD, Metal, Silicide cleaning ⦁ Post-cleaning PR strip, Solvent strip, Post-CMP cleaning Post-CVD, Metal cleaning ⦁ Etching Nitride strip, oxide etching, contact hole etching Specification 다목적 wet bench application Wafer cleaning KOH etching, oxide etching |
||||||||||||||||
